Research on laser spot location accuracy of low-power laser diode source applied to high precision laser measurement system

Abstract The results of laser spot location have an important influence on the accuracy a measurement system. Laser diode (LD) sources been widely used in recent years because its low cost and easy integration. Based low-power LD source, conventional system was built to study factors that affect location. We analyzed influencing from two aspects driven charge coupled device (CCD) imaging, experiments were conducted further obtain quantitative analysis laws different factors, including temperature, injection current, size imaging intensity fluctuation. drifting RMS dithering range R adapted evaluate drift dither respectively, error discussed. Finally, triangulation displacement sensor taken as optimization design example when considering studied this paper. As result, 3.6 μm repeatability 2.17 μm. experimental provided guidance for